| view 👀:22 |
🙍 oneddl |
redaktor: Baturi | Rating👍:
Nanoparticle Engineering for Chemical-Mechanical Planarization [#343651]
English | 2019 | ISBN: 9781420059113 | 222 ages | True PDF | 19.99 MB
In the development of next-generation nanoscale devices, higher speed and lower power operation is the name of the game. Increasing reliance on mobile computers, mobile phone, and other electronic devices demands a greater degree of speed and power. As chemical mechanical planarization (CMP) progressively becomes perceived less as black art and more as a cutting-edge technology, it is emerging as the technology for achieving higher performance devices.
Nanoparticle Engineering for Chemical-Mechanical Planarization explains the physicochemical properties of nanoparticles according to each step in the CMP process, including dielectric CMP, shallow trend isolation CMP, metal CMP, poly isolation CMP, and noble metal CMP. The authors provide a detailed guide to nanoparticle engineering of novel CMP slurry for next-generation nanoscale devices below the 60nm design rule. They present design techniques using polymeric additives to improve CMP performance. The final chapter focuses on novel CMP slurry for the application to memory devices beyond 50nm technology.
Most books published on CMP focus on the polishing process, equipment, and cleaning. Even though some of these books may touch on CMP slurries, the methods they cover are confined to conventional slurries and none cover them with the detail required for the development of next-generation devices. With its coverage of fundamental concepts and novel technologies, this book delivers expert insight into CMP for all current and next-generation systems.
Buy Premium From My Links To Get Resumable Support,Max Speed & Support Me
.html
https://rapidgator.net/file/0fc73a08d892aa7af944e815ff8ba8df/f5iwu.Nanoparticle.Engineering.for.ChemicalMechanical.Planarization.rar.html
⚠️ Dead Link ?
You may submit a re-upload request using the search feature.
All requests are reviewed in accordance with our Content Policy.
Significant surge in the popularity of free ebook download platforms. These virtual repositories offer an unparalleled range, covering genres that span from classic literature to contemporary non-fiction, and everything in between. Enthusiasts of reading can easily indulge in their passion by accessing free books download online services, which provide instant access to a wealth of knowledge and stories without the physical constraints of space or the financial burden of purchasing hardcover editions.
Comments (0)
Users of Guests are not allowed to comment this publication.